Succeed of Nanofabrication by Electrically Induced Nanopatterning

Abstract

This article is written to study inclusive miniaturization as well origami and alter fabricate. Hybrid add an addendum atmospheric has involved in controlled atmospheric chamber. Thereby usual accuse has been plasma linkage to resolve probe size utility for further miniaturization of ion beam probe tip. Henceforth, scripture has been possible to lower to accuse from electrically charged ion beams i.e. plasma compared to protocoled liquid metal ion source (LMIS). Accession as well has inclusive from traded scope of allied fabricate to limiting tolerance of features, given by, 5 nm from two or more probes.