ITO Glass to Confine Light for Optoelectronics

Abstract

Present paper is to subject indium tin oxide (ITO) coat of integrated circuit (IC) chips. Sol–gel-based films are usually prepared on glass or quartz substrate by dip- or spin-coat techniques. Deposited film is made to evaporate a medium of sol and subsequently a metal oxide/hydroxide xerogel film has formed. Advent of sol based processes has been controlled by morphology or crystal phase of indium tin oxide (ITO) particles by synthesis temperature and pH. Electro-optic properties of ITO such as unity refractive index modulation and epsilon-near-zero (ENZ) behaviour allows for active functional photonic devices on-chip, so forth accepted as potential viable way of fulfilling both size and power requirement for future photonic integrated circuit (PIC). Indium tin oxide (ITO) has refractive index changes in order of unity to show achievement of electrooptic modulation from sub-wavelength regions.
Interface of thin ITO films has adopted light confinement of plasmonics thereby compressing to nanometer scale for strong light-matter interactive act.