The Employments of Piezoelectric Actuators in Micro-and Nano positioning Applications

Abstract

Piezoelectric actuators (PEAs) have been broadly utilized as a part of small scale and nanopositioning applications because of their fine determination, quick reactions, and substantial activating strengths. Nonetheless, the presence of nonlinearities, for example, hysteresis makes displaying and control of PEAs testing. This paper audits the late accomplishments in demonstrating and control of piezoelectric actuators. In particular, different techniques for displaying straight and nonlinear practices of PEAs, including vibration flow, hysteresis, and wet blanket, is inspected;and the issues included are distinguished. In the control of PEAs as connected with orchestrating, an investigation of different control plans of both model-based and non-model-based is indicated near to their blocks. The inconveniences connected with the control issue are in like way talked about. This paper is closed with the making issues saw in appearing and control of PEAs for future examination.